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Retarded Growth of Sputtered HfO2 Films on Germanium

Retarded Growth of Sputtered HfO2 Films on Germanium

Kita, Koji; Sasagawa, Masashi; Toyama, Masahiro; Kyuno, Kentaro; Toriumi, Akira

期刊名称MRS Proceedings
作者Kita, Koji; Sasagawa, Masashi; Toyama, Masahiro; Kyuno, Kentaro; Toriumi, Akira
卷第809卷
电子ISSN1946-4274
文件大小279.13KB
发表时间2004-1
DOI10.1557/PROC-809-B5.5.1/D5.5

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