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In-Situ Friction and Pad Topography Measurements During CMP

Gray, Caprice; Apone, Daniel; Barns, Chris; Monsour, Moinpour; +Anjur', Sriram; Manno, Vincent; Rogers, Chris

期刊名称MRS Proceedings
作者Gray, Caprice; Apone, Daniel; Barns, Chris; Monsour, Moinpour; +Anjur', Sriram; Manno, Vincent; Rogers, Chris
卷第816卷
电子ISSN1946-4274
文件大小843.21KB
发表时间2004-1
DOI10.1557/proc-816-k5.4