Design and fabrication of a direction sensitive MEMS shear stress sensor with high spatial and temporal resolution
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Desai, A V; Haque, M A
- 卷第14卷
- 期第12期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小282.21KB
- 发表时间2004-12-01
- DOI10.1088/0960-1317/14/12/017
- 页码1718-1725