Measurement of micro-roughness using a metrological large range scanning force microscope

• 作者G. Dai; L. Jung; F. Pohlenz; H. Danzebrink; R. Krüger-sehm; K. Hasche; G. Wilkening
• 文件大小727.19KB
• 发表时间2004
• DOI10.1088/0957-0233/15/10/013