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[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Highly accurate grating reference fabricated by EB cell projection lithography

[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Highly accurate grating reference fabricated by EB cell projection lithography

Nakayama, Y.

作者Nakayama, Y.
文件大小219.34KB
发表时间2004
DOI10.1109/imnc.2004.245750
页码114-115

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