SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Projection maskless lithography
Brandstatter, Christoph; Mackay, R. Scott; Loeschner, Hans; Stengl, Gerhard; Lammer, Gertraud; Buschbeck, Herbert; Platzgummer, Elmar; Doring, Hans-Joachim; Elster, Thomas; Fortagne, Olaf
- 作者Brandstatter, Christoph; Mackay, R. Scott; Loeschner, Hans; Stengl, Gerhard; Lammer, Gertraud; Buschbeck, Herbert; Platzgummer, Elmar; Doring, Hans-Joachim; Elster, Thomas; Fortagne, Olaf
- 卷第5374卷
- 印刷ISSN0277-786X
- 文件大小367.66KB
- 发表时间2004
- DOI10.1117/12.535412