SPIE Proceedings [SPIE 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Dresden, Germany (Monday 12 January 2004)] 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Dynamic mask defects in hot embossing lithography
Bogdanski, N.; Schulz, Hubert; Wissen, Matthias; Scheer, Hella-Christin; Behringer, Uwe F. W.
- 作者Bogdanski, N.; Schulz, Hubert; Wissen, Matthias; Scheer, Hella-Christin; Behringer, Uwe F. W.
- 卷第5504卷
- 印刷ISSN0277-786X
- 文件大小996.37KB
- 发表时间2004
- DOI10.1117/12.568034
- 页码197-203