Electron beam irradiation of hydrogenated amorphous carbon films
- 作者L. Calliari; M. Filippi; N. Laidani
- 卷第36卷
- 期第8期
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小123.71KB
- 发表时间2004
- DOI10.1002/sia.1856
- 页码1126-1129
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