SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Improved construction method of a surface micromachined pin-jointed actuator tool using only two mechanical layers
Saucedo-Flores, Emmanuel; Varadan, Vijay K.; Ruelas, Ruben; Contreras-Nuno, Alejandro; Mireles, Jr., Jose
- 作者Saucedo-Flores, Emmanuel; Varadan, Vijay K.; Ruelas, Ruben; Contreras-Nuno, Alejandro; Mireles, Jr., Jose
- 卷第5389卷
- 印刷ISSN0277-786X
- 文件大小840.63KB
- 发表时间2004
- DOI10.1117/12.545329