![[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - A 50 nm-wide 5 μm-deep copper vertical gap formation method by a gap-narrowing post-process with Supercritical Fluid Deposition for Pirani gauge operating over atmospheric pressure]()
[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - A 50 nm-wide 5 μm-deep copper vertical gap formation method by a gap-narrowing post-process with Supercritical Fluid Deposition for Pirani gauge operating over atmospheric pressureKubota, Masanori; Mita, Yoshio; Momose, Takeshi; Kondo, Aiko; Shimogaki, Yukihiro; Nakano, Yoshiaki; Sugiyama, Masakazu · 2012