Design of functional coatings
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Hegemann, D.; Oehr, C.; Fischer, A.
- 卷第23卷
- 期第1期
- 印刷ISSN0734-2101
- 文件大小450.28KB
- 发表时间2005
- DOI10.1116/1.1814107
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