Formation of silicon on plasma synthesized SiOxNy and reaction mechanism

• 作者Ming Zhu; Xuejie Shi; Peng Chen; Weili Liu; Man Wong; Chenglu Lin; Paul K. Chu
• 卷第243卷
• 印刷ISSN0169-4332
• 文件大小308.83KB
• 发表时间2005
• DOI10.1016/j.apsusc.2004.09.056
• 页码89-95