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Characterization of strained Si structures using SIMS and visible Raman

Characterization of strained Si structures using SIMS and visible Raman

Gary G. Goodman; Vasil Pajcini; Stephen P. Smith; Philip B. Merrill

作者Gary G. Goodman; Vasil Pajcini; Stephen P. Smith; Philip B. Merrill
卷第8卷
印刷ISSN1369-8001
文件大小414.93KB
发表时间2005
DOI10.1016/j.mssp.2004.09.054
页码255-260

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