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Coupled BC/kLMC simulations of the temperature dependence of implant damage formation in silicon

Coupled BC/kLMC simulations of the temperature dependence of implant damage formation in silicon

G. Otto; D. Kovač; G. Hobler

作者G. Otto; D. Kovač; G. Hobler
卷第228卷
印刷ISSN0168-583X
文件大小104.31KB
发表时间2005
DOI10.1016/j.nimb.2004.10.054
页码256-259

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