Superconformal film growth: Mechanism and quantification
- 期刊名称IBM Journal of Research and Development
- 作者Moffat, T. P.; Wheeler, D.; Edelstein, M. D.; Josell, D.
- 卷第49卷
- 期第1期
- 印刷ISSN0018-8646
- 电子ISSN0018-8646
- 文件大小550.03KB
- 发表时间2005-01
- DOI10.1147/rd.491.0019
- 页码19-36
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