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[IEEE EuroSimE 2005. 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. - Berlin, Germany (April 18-20, 2005)] EuroSimE 2005. Proceedings of the 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. - Coupled electro-mechanics simulation methodology of the dynamic pull-in in micro-systems

[IEEE EuroSimE 2005. 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. - Berlin, Germany (April 18-20, 2005)] EuroSimE 2005. Proceedings of the 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. - Coupled electro-mechanics simulation methodology of the dynamic pull-in in micro-systems

Rochus, V.; Rixen, D.J.; Golinval, J.-C.
  • 作者Rochus, V.; Rixen, D.J.; Golinval, J.-C.
  • 文件大小983.78KB
  • 发表时间2005
  • DOI10.1109/esime.2005.1502828
  • 页码359-365
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