Achieving area-selective atomic layer deposition on patterned substrates by selective surface modification
Chen, Rong; Kim, Hyoungsub; McIntyre, Paul C.; Porter, David W.; Bent, Stacey F.
- 期刊名称Applied Physics Letters
- 作者Chen, Rong; Kim, Hyoungsub; McIntyre, Paul C.; Porter, David W.; Bent, Stacey F.
- 卷第86卷
- 期第19期
- 印刷ISSN0003-6951
- 文件大小582.32KB
- 发表时间2005
- DOI10.1063/1.1922076