Large Grain Polycrystalline Silicon Film Produced by Nano-Aluminum-Enhanced Crystallization of Amorphous Silicon

• 期刊名称Electrochemical and Solid-State Letters
• 作者Cai, Li; Wang, Hengyu; Brown, William; Zou, Min
• 卷第8卷
• 期第7期
• 印刷ISSN1099-0062
• 文件大小434.26KB
• 发表时间2005
• DOI10.1149/1.1928232