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Influence of the oxygen concentration of atomic-layer-deposited HfO[sub 2] films on the dielectric property and interface trap density

Park, Jaehoo; Cho, Moonju; Kim, Seong Keun; Park, Tae Joo; Lee, Suk Woo; Hong, Sug Hun; Hwang, Cheol Seong

期刊名称Applied Physics Letters
作者Park, Jaehoo; Cho, Moonju; Kim, Seong Keun; Park, Tae Joo; Lee, Suk Woo; Hong, Sug Hun; Hwang, Cheol Seong
卷第86卷
期第11期
印刷ISSN0003-6951
文件大小410.38KB
发表时间2005
DOI10.1063/1.1885167