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Annealing effects on the loss and birefringence of silicon oxynitride rectangular optical waveguides

Annealing effects on the loss and birefringence of silicon oxynitride rectangular optical waveguides

A. Zhang; K. T. Chan; M. S. Demokan; V. W. C. Chan; P. C. H. Chan; A. H. P. Chan

作者A. Zhang; K. T. Chan; M. S. Demokan; V. W. C. Chan; P. C. H. Chan; A. H. P. Chan
文件大小361.71KB
发表时间2005
DOI10.1063/1.2037856

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