Laser applications in microtechnology
- 作者Arnold Gillner; Jens Holtkamp; Claudia Hartmann; Alexander Olowinsky; Jens Gedicke; Kilian Klages; Lüdger Bosse; Alexander Bayer
- 卷第167卷
- 印刷ISSN0924-0136
- 文件大小318.68KB
- 发表时间2005
- DOI10.1016/j.jmatprotec.2005.05.049
- 页码494-498
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