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Electrical Properties of Ultrathin Al2O3 Films Grown by Metalorganic Chemical Vapor Deposition for Advanced Complementary Metal-oxide Semiconductor Gate Dielectric Applications

Electrical Properties of Ultrathin Al2O3 Films Grown by Metalorganic Chemical Vapor Deposition for Advanced Complementary Metal-oxide Semiconductor Gate Dielectric Applications

Skordas, Spyridon; Papadatos, Filippos; Consiglio, Steven; Eisenbraun, Eric T.; Kaloyeros, Alain E.; Gusev, Evgeni P.
  • 期刊名称Journal of Materials Research
  • 作者Skordas, Spyridon; Papadatos, Filippos; Consiglio, Steven; Eisenbraun, Eric T.; Kaloyeros, Alain E.; Gusev, Evgeni P.
  • 卷第20卷
  • 期第6期
  • 印刷ISSN0884-2914
  • 电子ISSN2044-5326
  • 文件大小193.92KB
  • 发表时间2005-6
  • DOI10.1557/JMR.2005.0196
  • 页码1536-1543
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