Atomic Layer Chemical Vapor Deposition and Electrical Characterization of Hafnium Silicate Films
- 期刊名称Journal of The Electrochemical Society
- 作者Kim, Jaehyun; Yong, Kijung
- 卷第152卷
- 期第4期
- 印刷ISSN0013-4651
- 文件大小250.43KB
- 发表时间2005
- DOI10.1149/1.1869977
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