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Electroplated Ni microcantilever probe with electrostatic actuation

Electroplated Ni microcantilever probe with electrostatic actuation

Toshihiro Itoh; Shingo Kawamura; Kenichi Kataoka; Tadatomo Suga

作者Toshihiro Itoh; Shingo Kawamura; Kenichi Kataoka; Tadatomo Suga
印刷ISSN0924-4247
文件大小444.02KB
发表时间2005
DOI10.1016/j.sna.2005.03.023
页码490-496

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