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High-rate and low-temperature synthesis of TiO[sub 2], TiN, and TiO[sub 2]∕TiN∕TiO[sub 2] thin films and study of their optical and interfacial characteristics

High-rate and low-temperature synthesis of TiO[sub 2], TiN, and TiO[sub 2]∕TiN∕TiO[sub 2] thin films and study of their optical and interfacial characteristics

M. J. Jung; H. Y. Lee; J. G. Han; C. Jung; J. Moon; J. Boo

作者M. J. Jung; H. Y. Lee; J. G. Han; C. Jung; J. Moon; J. Boo
文件大小618.33KB
发表时间2005
DOI10.1116/1.1978903

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