Impact of Tunnel Etching Process on Electrical Performances of SON Devices

• 作者V. Caubet; S. Borel; C. Arvet; J. Bilde; D. Chanemougame; S. Monfray; R. Ranica; P. Mazoyer; T. Skotnicki
• 文件大小183.36KB
• 发表时间2005
• DOI10.1143/JJAP.44.5795