SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey, CA (Monday 4 May 2009)] Scanning Microscopy 2009 - Enabling accurate gate profile control with inline 3D-AFMBao, Tianming; Postek, Michael T.; Lopez, Andrew; Newbury, Dale E.; Platek, S. Frank; Dawson, Dean; Joy, David C. · 2009