[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - The 2D feedback conveyance with ciliary actuator arrays
Ataka, M.; Legrand, B.; Buchaillot, L.; Collard, D.; Fujita, H.
- 作者Ataka, M.; Legrand, B.; Buchaillot, L.; Collard, D.; Fujita, H.
- 卷第1卷
- 文件大小647.65KB
- 发表时间2005
- DOI10.1109/sensor.2005.1496351
- 页码31-34