SPIE Proceedings [SPIE Congress on Optics and Optoelectronics - Warsaw, Poland (Sunday 28 August 2005)] Lasers and Applications - Wide band laser-plasma soft X-ray source using a gas puff target for direct photo-etching of polymers
Bartnik, Andrzej; Abramski, Krzysztof M.; Lapucci, Antonio; Fiedorowicz, Henryk; Jarocki, Roman; Plinski, Edward F.; Kostecki, Jerzy; Rakowski, Rafał; Szczurek, Mirosław
- 作者Bartnik, Andrzej; Abramski, Krzysztof M.; Lapucci, Antonio; Fiedorowicz, Henryk; Jarocki, Roman; Plinski, Edward F.; Kostecki, Jerzy; Rakowski, Rafał; Szczurek, Mirosław
- 卷第5958卷
- 印刷ISSN0277-786X
- 文件大小591.30KB
- 发表时间2005
- DOI10.1117/12.622119