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Hydride vapor phase epitaxial growth of thick GaN layers with improved surface flatness

Frank Habel; Peter Brückner; Jenq-Dar Tsay; Wen-Yueh Liu; Ferdinand Scholz; Dietmar Schmitz; Assadullah Alam; Michael Heuken

作者Frank Habel; Peter Brückner; Jenq-Dar Tsay; Wen-Yueh Liu; Ferdinand Scholz; Dietmar Schmitz; Assadullah Alam; Michael Heuken
卷第2卷
期第7期
印刷ISSN1610-1634
电子ISSN1610-1642
文件大小121.20KB
发表时间2005
DOI10.1002/pssc.200461459
页码2049-2052