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SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - Theory and simulation of MEMS deformable mirror

Yan, Jinliang; Esashi, Masayoshi; Zhou, Zhaoying; Zhao, Yinnv; Yu, Fen; Zhu, Youliang; Zhang, Hongzhao

作者Yan, Jinliang; Esashi, Masayoshi; Zhou, Zhaoying; Zhao, Yinnv; Yu, Fen; Zhu, Youliang; Zhang, Hongzhao
卷第6032卷
印刷ISSN0277-786X
文件大小235.78KB
发表时间2005
DOI10.1117/12.667868