Nanoscale Calibration Standards and Methods (Dimensional and Related Measurements in the Micro- and Nanometer Range) || Nanometrology at the IMGC
- 作者Wilkening, Günter; Koenders, Ludger
- 文件大小532.93KB
- 发表时间2005
- DOI10.1002/3527606661.ch2
- 页码22-37
海量图书期刊资源，随时随地畅享阅读乐趣