Residual Stress Behavior of Polyimide Thin Films: Effect of Precursors
- 期刊名称JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
- 作者Yoo, Dong Keun; Shim, Sang June; Lee, Dong Hyun; Kim, Ji Heung; Lee, Young Kwan; Kim, Young Jun; Kim, Sung Woo; Kim, Dukjoon
- 卷第38卷
- 期第8期
- 印刷ISSN0021-9592
- 文件大小580.08KB
- 发表时间2005
- DOI10.1252/jcej.38.615
- 页码615-622
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