A swing-arm on-machine inspection method for profile measurement of large optical surface in lapping process
- 作者In Kyoung Sung; Chang Jin Oh; Eung Suk Lee; Ock Hyun Kim
- 卷第19卷
- 期第8期
- 印刷ISSN1738-494X
- 电子ISSN1976-3824
- 文件大小520.35KB
- 发表时间2005-08
- DOI10.1007/bf03023935
- 页码1576-1581
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