Molecular dynamics study of velocity distribution and local temperature change during rapid cooling processes in excimer-laser annealed silicon
Byoung Min Lee; Shinji Munetoh; Teruaki Motooka
- 作者Byoung Min Lee; Shinji Munetoh; Teruaki Motooka
- 卷第37卷
- 期第3期
- 印刷ISSN0927-0256
- 文件大小370.69KB
- 发表时间2006
- DOI10.1016/j.commatsci.2006.01.017