Modeling Magnetron Sputter Deposition
- 期刊名称Materials and Manufacturing Processes
- 作者Johnson, Mark; Cote, Paul
- 卷第21卷
- 期第6期
- 印刷ISSN1042-6914
- 电子ISSN1532-2475
- 文件大小1055.54KB
- 发表时间2006-09
- DOI10.1080/10426910600611045
- 页码628-633
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