Moisture-absorption-induced permittivity deterioration and surface roughness enhancement of lanthanum oxide films on silicon
- 期刊名称Applied Physics Letters
- 作者Zhao, Yi; Toyama, Masahiro; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira
- 卷第88卷
- 期第7期
- 印刷ISSN0003-6951
- 文件大小384.71KB
- 发表时间2006
- DOI10.1063/1.2174840
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