Characteristics of atomic layer deposited TiO[sub 2] films and their photocatalytic activity
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Pheamhom, Rodjana; Sunwoo, Changshin; Kim, Do-Heyoung
- 卷第24卷
- 期第4期
- 印刷ISSN0734-2101
- 文件大小374.14KB
- 发表时间2006
- DOI10.1116/1.2172941
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