The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film

• 作者X.B. Wang; C. Song; D.M. Li; K.W. Geng; F. Zeng; F. Pan
• 卷第253卷
• 期第3期
• 印刷ISSN0169-4332
• 文件大小372.96KB
• 发表时间2006
• DOI10.1016/j.apsusc.2006.02.059
• 页码1639-1643