Real-time impedance matching system using liquid stub tuners in ICRF heating

K. Saito; R. Kumazawa; C. Takahashi; M. Yokota; H. Takeuchi; T. Mutoh; T. Seki; F. Shimpo; G. Nomura; T. Watari; A. Komori; Y. Torii; J.S. Yoon; J.G. Kwak; Y. Zhao

作者K. Saito; R. Kumazawa; C. Takahashi; M. Yokota; H. Takeuchi; T. Mutoh; T. Seki; F. Shimpo; G. Nomura; T. Watari; A. Komori; Y. Torii; J.S. Yoon; J.G. Kwak; Y. Zhao
卷第81卷
印刷ISSN0920-3796
文件大小332.13KB
发表时间2006
DOI10.1016/j.fusengdes.2006.07.032
页码2837-2842

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Real-time impedance matching system using liquid stub tuners in ICRF heating