Nanofabrication based on MEMS technology
- 期刊名称IEEE Sensors Journal
- 作者Yuelin Wang, ; Xinxin Li, ; Tie Li, ; Heng Yang, ; Jiwei Jiao,
- 卷第6卷
- 期第3期
- 印刷ISSN1530-437X
- 文件大小3242.28KB
- 发表时间2006-06
- DOI10.1109/jsen.2006.874034
- 页码686-690
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