Simultaneous double side grinding of silicon wafers: a literature review
- 作者Z.C. Li; Z.J. Pei; Graham R. Fisher
- 卷第46卷
- 印刷ISSN0890-6955
- 文件大小489.10KB
- 发表时间2006
- DOI10.1016/j.ijmachtools.2005.09.011
- 页码1449-1458
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