Formation of silicon germanium nitride layer with distributed charge storage elements

• 期刊名称Applied Physics Letters
• 作者Tu, Chun-Hao; Chang, Ting-Chang; Liu, Po-Tsun; Liu, Hsin-Chou; Chen, Wei-Ren; Tsai, Chia-Chou; Chang, Li-Ting; Chang, Chun-Yen
• 卷第88卷
• 期第11期
• 印刷ISSN0003-6951
• 文件大小351.71KB
• 发表时间2006
• DOI10.1063/1.2178868