Micromachined inking chip for scanning probe nanolithography using local thermal vapor inking method
- 期刊名称Applied Physics Letters
- 作者Li, Shifeng; Shaikh, Kashan A.; Szegedi, Sandra; Goluch, Edgar; Liu, Chang
- 卷第89卷
- 期第17期
- 印刷ISSN0003-6951
- 文件大小659.10KB
- 发表时间2006
- DOI10.1063/1.2364881
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