Higher-k LaYO[sub x] films with strong moisture resistance
Zhao, Yi; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira
- 期刊名称Applied Physics Letters
- 作者Zhao, Yi; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira
- 卷第89卷
- 期第25期
- 印刷ISSN0003-6951
- 文件大小356.37KB
- 发表时间2006
- DOI10.1063/1.2420794