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Liquid-Injection Atomic Layer Deposition of TiO[sub x] and Pb–Ti–O Films

Liquid-Injection Atomic Layer Deposition of TiO[sub x] and Pb–Ti–O Films

Watanabe, Takayuki; Hoffmann-Eifert, Susanne; Hwang, Cheol Seong; Waser, Rainer

期刊名称Journal of The Electrochemical Society
作者Watanabe, Takayuki; Hoffmann-Eifert, Susanne; Hwang, Cheol Seong; Waser, Rainer
卷第153卷
期第9期
印刷ISSN0013-4651
文件大小247.69KB
发表时间2006
DOI10.1149/1.2219709

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