[IEEE The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Traverse City, MI, USA (2006.06.4-2006.06.8)] The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Phase control of N-type nanocrystalline diamond films deposited in microwave plasmas from methane and acetylene

• 作者Ikeda, T.; Teii, K.
• 文件大小134.90KB
• 发表时间2006
• DOI10.1109/plasma.2006.1707166
• 页码293-293