![[IEEE 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Paris, France (2019.5.12-2019.5.15)] 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Characterization of the activation of yttrium-based getter films by electrical measurements and ion-beam analyses]()
[IEEE 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Paris, France (2019.5.12-2019.5.15)] 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Characterization of the activation of yttrium-based getter films by electrical measurements and ion-beam analysesBessouet, Clement; Lemettre, Sylvain; Bosseboeuf, Alain; Coste, Philippe; Lecoq, Helene; Sauvage, Thierry; Moulin, Johan · 2019