Mobility Enhancement by Strained Nitride Liners for 65nm CMOS Logic Design Features
Ortolland, Claude; Morin, Pierre; Arnaud, Franck; Orain, Stephane; Reddy, Chandra; Chaton, Catherine; Stolk, Peter
- 期刊名称MRS Proceedings
- 作者Ortolland, Claude; Morin, Pierre; Arnaud, Franck; Orain, Stephane; Reddy, Chandra; Chaton, Catherine; Stolk, Peter
- 卷第913卷
- 电子ISSN1946-4274
- 文件大小139.02KB
- 发表时间2006-1
- DOI10.1557/PROC-0913-D02-02