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Mobility Enhancement by Strained Nitride Liners for 65nm CMOS Logic Design Features

Ortolland, Claude; Morin, Pierre; Arnaud, Franck; Orain, Stephane; Reddy, Chandra; Chaton, Catherine; Stolk, Peter

期刊名称MRS Proceedings
作者Ortolland, Claude; Morin, Pierre; Arnaud, Franck; Orain, Stephane; Reddy, Chandra; Chaton, Catherine; Stolk, Peter
卷第913卷
电子ISSN1946-4274
文件大小139.02KB
发表时间2006-1
DOI10.1557/PROC-0913-D02-02