A Novel Optical Technique to Measure Pad-Wafer Contact Area in Chemical Mechanical Planarization

• 期刊名称MRS Proceedings
• 作者Elmufdi, Carolina L.; Muldowney, Gregory P.
• 卷第914卷
• 电子ISSN1946-4274
• 文件大小424.83KB
• 发表时间2006-1
• DOI10.1557/PROC-0914-F12-06